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Search for "microelectromechanical systems (MEMS)" in Full Text gives 6 result(s) in Beilstein Journal of Nanotechnology.

Relationship between corrosion and nanoscale friction on a metallic glass

  • Haoran Ma and
  • Roland Bennewitz

Beilstein J. Nanotechnol. 2022, 13, 236–244, doi:10.3762/bjnano.13.18

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  • resistance of CuZr-based MG gears is superior to that of high-performance steel. Metallic glasses can be formed thermoplastically in the supercooled liquid regime [9][10]. This process allows for the application of MGs in microelectromechanical systems (MEMS) [11]. The tribological performance on the
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Published 18 Feb 2022

An overview of microneedle applications, materials, and fabrication methods

  • Zahra Faraji Rad,
  • Philip D. Prewett and
  • Graham J. Davies

Beilstein J. Nanotechnol. 2021, 12, 1034–1046, doi:10.3762/bjnano.12.77

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  • microneedle systems applications, designs, material selection, and manufacturing methods. Keywords: drug delivery; microelectromechanical systems (MEMS); microfabrication; microneedles; point-of-care diagnostics; Introduction The concept of microneedle structures to penetrate painlessly the outermost layer
  • microelectromechanical systems (MEMS) and provided a platform for microfabrication of compact miniaturized medical devices for human health screening, monitoring, and diagnostic purposes. Microneedles are microstructures that are sharp and robust enough for skin penetration, made using MEMS technology. The application
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Published 13 Sep 2021

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

  • Serguei Chiriaev,
  • Luciana Tavares,
  • Vadzim Adashkevich,
  • Arkadiusz J. Goszczak and
  • Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

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  • for the fabrication of a range of microoptical and microfluidic devices and microelectromechanical systems (MEMS). Possible applications of the method for microoptical devices are discussed in detail in our previous work [4]. They include tuning the thickness of the dielectric layer in the metal
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Published 06 Nov 2020

Mechanical and thermodynamic properties of Aβ42, Aβ40, and α-synuclein fibrils: a coarse-grained method to complement experimental studies

  • Adolfo B. Poma,
  • Horacio V. Guzman,
  • Mai Suan Li and
  • Panagiotis E. Theodorakis

Beilstein J. Nanotechnol. 2019, 10, 500–513, doi:10.3762/bjnano.10.51

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  • ], AFM base-force spectroscopy [51], or by the design of sophisticated microelectromechanical systems (MEMS) [52]. These techniques have been successfully used to predict the elastic properties of several biomolecules. However, OT are limited to applied loads below 0.1 nN and AFM has delicate calibration
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Published 19 Feb 2019

High-bandwidth multimode self-sensing in bimodal atomic force microscopy

  • Michael G. Ruppert and
  • S. O. Reza Moheimani

Beilstein J. Nanotechnol. 2016, 7, 284–295, doi:10.3762/bjnano.7.26

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  • numerous integrated sensing approaches. These include capacitive [13], piezoresistive [14], piezoelectric [15] and magnetoresistive [16] sensing. A common drawback of self-sensing approaches applied to microelectromechanical systems (MEMS) is the fact that drive and sense electrodes share a common node
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Published 24 Feb 2016

A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

  • Tobias Meier,
  • Alexander Förste,
  • Ali Tavassolizadeh,
  • Karsten Rott,
  • Dirk Meyners,
  • Roland Gröger,
  • Günter Reiss,
  • Eckhard Quandt,
  • Thomas Schimmel and
  • Hendrik Hölscher

Beilstein J. Nanotechnol. 2015, 6, 451–461, doi:10.3762/bjnano.6.46

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  • ]. Therefore, we used such magnetic tunneling junctions with magnetostrictive electrodes deposited and patterned on Si substrates as strain sensor on AFM cantilevers. The Si substrates were structured into AFM cantilevers by means of microelectromechanical systems (MEMS) technology [35]. The magnetic tunneling
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Published 13 Feb 2015
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